Presentation 66,67
Presentation 66
Mechanical Amplification In a Micromechanical Nonlinear Resonator
R・Almog，S・Zaitsev O, Shtempluck and E・Buks
Department of Electrical Engineering Technion
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Micro/Nanoelectromechanical resonators play a key role in microdevices for applications such as sensing, switching, and filtering. The relatively small force needed for driving a microresonator into the nonlinear regime is usually easily accessible, enabling thus a variety of useful applications such as frequency mixing and frequency synchronization. Since nano-scale displacement detection is highly challenging, it is desirable to implement an on-chip mechanical amplification mechanism.
In this research we demonstrate mechanical amplification using a bifurcating dynamical system. We employ nonlinear frequency mixing near the onset of Duffing bistability to amplify small displacement signals. Our device consists of a PdAu beam serving as a micromechanical resonator, excited by an adjacent gate electrode. A large pump signal drives the resonator near the onset of bistability, enabling amplification of small signals in a narrow bandwidth.
To first order, the amplification is inversely proportional to the frequency difference between the pump and the signal. We demonstrate experimentally high signal gain in this regime. This method of amplification may allow enhancing the sensitivity of sensors based on microresonators.
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