Presentation 5

3D-Microbatteryの記述

Novel High-power 3D-Microbattery For MEMS and Medical Applications
E. Peled, M.Nathan, D.Golodnitsky, E.Strauss, V.Yufit, T.Ripenbein, Shechtman, S.Menkin
1 - School of chemistry;
2 - Department of Physical Electronics, School of Electrical Engineering;
3 - Wolfson Applied Materials Research Center;
Tel Aviv University, Tel Aviv

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A novel 3D-microbattery (3D-MB) recently developed at Tel Aviv University meets both energy-density and the size demands of microelectronic, microelectromechanical systems and implanted medical devices.Our 3D-MBs are formed in perforated high-aspect-ratio silicon and micro-channel-plate (MCP) glass substrates. A sandwich-like thin-film battery structure is deposited conformably and sequentially on all available surfaces of the substrate with the use of wet chemistry.

Every battery layer is interconnected between all holes through both top and bottom surfaces. The smallest single battery “unit” is a channel about 50 microns in diameter and 500 microns high, which is equal to the thickness ob substrate.The number of microchannels and, thus, battery units is about 30,000/cm2. The use of a perforated substrate provides additional active electrode area, which in turn, is followed by more than an order of magnitude enhancement of capacity and energy density per given substrate footprint.

A number of 3D-on-MCP cells were assembled and tested over successive charge/discharge cycles, demonstrating outstanding capacity of ca.2mAh/cm2 (20microAh/mm2), about 25 times the capacity of an identical footprint 2D-cell. The obtained energy density was 34microWh/mme about seven times larger than that of the best existing thin-film about 10 mAh/cm2 (100 microAh/mm2) and an energy density 170 microWh/mm2, about 34 times larger than that of the best thin film battery enough for many projected autonomous MEMS and in-vivo medical uses. In addition, at the end of its development, out 3D-MB is expected to have a very high power density of about 500 microW / mm2.

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http://www.tau.ac.il/chemistry/peled/
http://www.tau.ac.il/chemistry/golodnitsky/
http://www.physics.uiuc.edu/People/Nathan/index.htm